Canon Meets Growing Demand for Internet-of-Things Support with New 200mm Wafer Option for I-Line, KrF Semiconductor Lithography Equipment
Canon U.S.A., Inc., a leader in digital imaging solutions, today announced that its parent company, Canon Inc., has begun sales of a 200 millimeter (mm) option for the company's FPA-5550iZ2 i-line and the FPA-6300ES6a KrF semiconductor lithography equipment, released in December 2016 and April 2012 respectively.
FPA-5550iZ2 i-line1 and the FPA-6300ES6a KrF semiconductor lithography equipment are renowned for their capability to mass-produce logic, memory and image sensor devices suited for Internet-of-Things (IoT) and automotive technologies.
In order to produce semiconductor devices, such as memory and microprocessors, a 300mm diameter wafer and the latest miniaturization technology are commonly used in manufacturing. The rapid expansion of the IoT and automotive devices has led to an increased demand for small-lot production using a wide variety of existing processes to meet a growing need among device makers for equipment capable of processing 200 mm wafers.
Canon's FPA-5550iZ2 and FPA-6300ES6a semiconductor lithography equipment have high productivity and overlay accuracy. They are now capable of meeting the demands of an even wider range of applications with the new 200 mm option, compared to support for only 300 mm wafers previously.
When equipped with the 200 mm option, these systems deliver among the industry's highest throughput among same class lithography equipment. Offering up to 230 wafers per hour productivity for the FPA-5550iZ2 and up to 255 wafers per hour5 for the FPA-6300ES6a, both systems can contribute to cost savings for owners.
Both the FPA-5550iZ2 and FPA-6300ES6a allow for easy, continuous option and field upgrades which can provide process flexibility, increase productivity and improve overlay accuracy. By developing and offering a wide variety of semiconductor lithography equipment solutions and upgrade options, Canon continues to demonstrate its support of increasing user needs.